VDEC 所有 EB描画装置 を利用して得られた成果リスト

2001年度分
EBアカウントの研究室名により分類


東京大学大学院工学系研究科システム量子工学専攻中沢・高橋研究室
Nakazawa-Takahashi Lab, Dept. Quantum Systems Eng., U.Tokyo

Last Updated: 2002/04/15

Author(s) Title Journal Volume No. Page(s) Date
Takahashi H, Mori K, Yokoi K, Fukuda D, Nakazawa M, Yasuda N, Yamamoto M, Hasegawa K ``Development of a new multi-grid-type microstrip gas chamber'' Nucl. Instrum and Methods in Phys. Res. A Vol. 477 No. (1-3) pp. 13--16 JAN 21 2002
Takahashi H, Yokoi K, Yano K, Fukuda D, Nakazawa M, Kishimoto S, Hasegawa K ``Development of a multigrid-type microstrip gas chamber'' IEEE Trans. on Nucl. Sci. Vol. 48 No. 6 pp. 2317-2320 DEC 2001
Takahashi H, Yokoi K, Yano K, Fukuda D, Nakazawa M, Hasegawa K ``A new multi-grid type MSGC with pad readout'' Nucl. Instrum. & Methods in Phys. Res. A Vol. 471 No. (1-2) pp. 120-124 SEP 21 2001
Yoshihiko Noguchi, Daiji Fukuda, Masashi Ohno, Toru Naruse, Masaharu Nakazawa, Hiroyuki Takahashi, Manabu Ataka, Masahiro Ukibe, Fuminori Hirayama and Masataka Ohkubo ``DEVELOPMENT OF X-RAY MICROCALORIMETERS WITH MONO-LAYERED SUPERCONDUCTING TRANSITION EDGE SENSORS'' KEK Proceedings 2001-20 RADIATION DETECTORS AND THEIR USES : the 15th Workshop on Radiation Detectors and Their Uses pp. 8--17 2001
Masashi Ohno, Yoshihiko Noguchi, Daiji Fukuda, Hiroyuki Takahashi, Masaharu Nakazawa, Manabu Ataka, Masahiro Ukibe, Fuminori Hirayama, Masataka Ohkubo and Hirohiko M.Shimizu ``Development of the X-ray microcalorimeter with a superconductive Ir layer'' AIP Conference Proceedings LOW TEMPERATURE DETECTORS :the 9th International Workshop on Low Temperature Detectors 605 pp. 259--262 2002
Daiji Fukuda, Yoshihiko Noguchi, Masashi Ohno, Hiroyuki Takahashi, Manabu Ataka, Harald Pressler, Fuminori Hirayama, Masahiro Ukibe, Masataka Ohkubo, Hirohiko M.Shimizu and Masaharu Nakazawa ``TES X-ray Microcalorimeters with Single Element Superconductors'' AIP Conference Proceedings LOW TEMPERATURE DETECTORS :the 9th International Workshop on Low Temperature Detectors 605 pp. 263--266 2002
Yoshihiko Noguchi, Hiroyuki Takahashi, Daiji Fukuda, Masashi Ohno, Masaharu Nakazawa, Manabu Ataka, Masahiro Ukibe, Fuminori Hirayama and Masataka Ohkubo ``A new Readout Scheme for Imaging TES Based on Cooling Time Measurement'' AIP Conference Proceedings LOW TEMPERATURE DETECTORS :the 9th International Workshop on Low Temperature Detectors 605 pp. 325--328 2002
Daiji Fukuda, Hiroyuki Takahashi, Masashi Ohno and Masaharu Nakazawa ``Ir TES for X-ray microcalorimters'' Nucl. Instrum. & Methods in Phys. Res. A Vol. 444 pp. 241--244 2000
Daiji Fukuda, Hiroyuki Takahashi, Masashi Ohno, Yoshihiko Noguchi and Masaharu Nakazawa ``Computer calculation of the ETF-TES property and development of Ir TES for x-ray microcalorimters'' Radiation Vol. 26 No. 1 pp. 95--103 2000
Daiji Fukuda, Hiroyuki Takahashi, Masashi Ohno, Yoshihiko Noguchi and Masaharu Nakazawa ``Development of superconducitve transition edge x-ray microcalorimeter using a supettered Ir film'' KEK Proceedings 2001-20 RADIATION DETECTORS AND THEIR USES : the 14th Workshop on Radiation Detectors and Their Uses 2001-14 pp. 218--225 2000
福田大治, 大野雅史, 野口佳彦, 高橋浩之, 中沢正治, 安宅学 ``単一超伝導体を用いたTESマイクロカロリメータの開発'' 電気学会研究会原子力研究会資料 NE-00-12 2000 Sep.

東京大学中野研究室
Nakano Lab., Dept. Elec. Eng., U.Tokyo

Last Updated: 2002/04/15

Author(s) Title Journal Volume No. Page(s) Date
Xueilang Song, Naoki Futakuchi, Daisuke Miyashita, Masaki Kato, and Yoshiaki Nakano InGaAsP/InP Monolithic SOA Mach-Zehnder Interferometer Optical Switches Fabricated Entirely by Selective Area MOVPE 10th European Conference on Integrated Optics, Paderborn, Germany pp.102-105 2001年4月
Mitsuru Takenaka, Masumi Saitoh, Yoshiaki Nakano Self-align electrode separation of directionally coupled semiconductor optical amplifier SPIE The International Society for Optical Engineering 4532 pp.361-368 2001年8月

東京大学下山研究室/Shimoyama Lab., Dept. Mech. Eng., U.Tokyo

Last Updated: 2002/04/15

Author(s) Title Journal Volume No. Page(s) Date
Department of Mechano-Informatics, The University of Tokyo ``An All-Polymer Thin-Film Scanning Optical Filter for 3D-Image Displays'' IEEE International Micro Electro Mechanical Systems (MEMS'02), Las Vegas, USA pp. 487-490 2002, Jan.
Department of Mechano-Informatics, The University of Tokyo ``Fabrication of High-Aspect-Ratio PZT Thick Film Structure using Sol-Gel Technique and SU-8 Photoresist'' IEEE International Micro Electro Mechanical Systems (MEMS'02), Las Vegas, USA pp. 168-171 2002, Jan.
Department of Mechano-Informatics, The University of Tokyo ``Sequential Batch Assembly of 3-D Microstructures with Elastic Hinges by a Magnetic Field'' IEEE International Micro Electro Mechanical Systems (MEMS'02), Las Vegas, USA pp. 188-191 2002, Jan.
Department of Mechano-Informatics, The University of Tokyo ``A Stereoscopic Display with a Vibrating Microlens Array'' IEEE International Micro Electro Mechanical Systems (MEMS'02), Las Vegas, USA pp. 524-527 2002, Jan.

東京大学生産技術研究所藤田研究室,日仏集積化メカトロニクス研究センター
LIMMS/Fujita Lab, IIS, U.Tokyo

Last Updated: 2002/04/15

Author(s) Title Journal Volume No. Page(s) Date
T.Bourouina, A.Garnier, H.Fujita ``Effect of Direct Current Bias Field and Alternating Current Excitation Field on Vibration Amplitudes and Resonance Frequencies in Bending and Torsion Modes of a Magnetostrictively-actuated Bimorph Microresonator'' Journal of Applied Physics Vol.91 No. 1 pp.112-120 2002.
Khalfallah S, Gorecki C, Podlecki J, Nishioka M, Kawakatsu H, Arakawa Y ``Wet-etching fabrication of multilayer GaAlAs/GaAs microtips for scanning near-field optical microscopy'' Applied Physics A-Materials Science & Processing Vol.71 No. 2 pp.223-225 2000 Aug.
C. Gorecki, S. Khalfallah, H. Kawakatsu, Y. Arakawa ``New SNOM sensor using optical feedback in a VCSEL-based compound-cavity'' Sensors and Actuators A-Physical Vol.87 No. 3 pp.113-123 2001 Jan.
Hideyuki Maekoba, Philippe Helin, Gilbert Reyne, Tarik Bourouina, Hiroyuki Fujita ``Self-aligned vertical mirror and V-grooves applied to an optical-switch: modeling and optimization of bi-stable operation by electromagnetic actuation'' Sensors and Actuators, A PHYSICAL, Micromechanics section in this issue Volume A87 issue 3, Completing Volume 87 pp.172-178 2001 Jan. 5.
藤田博之 「光MEMS技術の最近の動向」 電気学会論文誌E、センサ・マイクロマシン準部門誌 vol.121-E No.12 pp.621-624 2001 Dec.
安井学、平林康男、藤田博之 「マイクロマシニングとしてのニッケル電鋳技術の応用」 表面技術 Vol.52 No.11 pp.734-737 2001
藤田博之 「シリコンマイクロシステムと細胞操作への応用」 日本エム・イー学会機関紙BME Vol.15 No.10 pp.31-36 2001 Oct.
Laurent Griscom, Patrick Degenaar, Bruno LePioufle Eichi Tamiya, Hiroyuki Fujita ``Cell placement and Neural guidance using a three-dimensional microfluidic array'' Japanese Journal of Applied Physics Vol.40 9A pp.5485-5490 2001 Sept.
Laurent Griscom, Patrick Degenaar, Bruno LePioufle Eichi Tamiya, Hiroyuki Fujita ``Techniques for patterning and guidance of primary culture neurons on micro-electrode arrays'' Sensors and Actuators B 4158 pp.1-7 2002.
P. Degenaar, B. Le Pioufle, L. Griscom, A. Tixier, Y. Akagi, Y. Morita, Y. Murakami, K. Yokoyama, H. Fujita, and E. Tamiya ``A Method for Micrometer Resolution Patterning of Primary Culture Neurons for SPM Analysis1'' J. Biochem. Vol. 130 pp. 367-376 2001
P. Surbled, C. Clerc, B. Le Pioufle, M. Ataka, H. Fujita ``Effect of the Composition and Thermal Annealing on the Transformation Temperatures of Sputtered TiNi Shape Memory Alloy Thin Films'' Thin Solid Films Vol 401 1-2 pp. 52-59 2001
Hiroyuki Fujita, Hiroshi Toshiyoshi, Gen Hashiguchi, Yasuo Wada ``Micromachined tools for nano technology'' Riken Review Focused on Science and Technology in Micro/Nano Scale, The Institute of Physical and Chemical Research No.36 pp.12-15 2001 Jun.
Hiroyuki Fujita ``Optical NEMS and Applications in Photonic Networks'' Technical Digest CPT 2001,Fourth International Topical Workshop on Contemporary PhotonicTechnologies - New Generation Optical Networking and key Technologies -Toshi Center Hotel, Tokyo, Japan pp.49-53 2000 Jan. 15-17
R. Ohigashi, K. Tsuchiya, Y. Mita, and H. Fujita ``Micro Capillaries Array Head for Direct Drawing of Fine Patterns'' IEEE International Conference on MicroElectroMechanical Systems (MEMS 2001), Interlaken, Switzerland pp.389-392 2001 Jan. 21-25
M.Mita, M.Arai, S.Tensaka, D. Kobayashi, P. Basset, A. Kaiser, P. Masquelier, L. Buchaillot, D. Collard and H. Fujita ``Electrostatic Impact-drive Actuator'' Proc. 14th IEEE Micro Electro Mechanical System, Interlaken, Switzerland pp. 590-593 2001 Jan.
K.Kakushima, M.Mita, D.Kobayashi, J.Endo, Y.Wada, H.Fujita ``Micromachined Tools for Nano Technology -Twin Nano-Probes and Nano-Scale Gap Control by Integrated Microactuators-'' Technical Digest of Micro Electro Mechanical Systems (MEMS)2001, Interlak en, Switzerland pp.294-297 2001 Jan. 21-25
Jun Chen, Junji Endo, Yoshiaki Niino, and Hiroyuku Fujita ``Phase-shifting interference microscopy using a Fresnel's biprism'' Optical Engineering for Sensing and Nanotechnology(ICOSN 2001),Yokohama, Japan Proc. SPIE Volume 4416 pp158-161 2001 Jun. 6-8
K.Kakushima, M.Mita, Y.Mita, H.Fujita ``Fabrication of various shapes nano structure using Si anisotropic etching and silicidation'' 11th International Conference on Solid-State Sensors and Actuators, Transducers'01 / Eurosensors XV, Munich, Germany pp.1090-1091 2001 Jun. 13
Y. Mita, M. Arai, A. Tixier and H. Fujita ``Bulk Micromachined Durable Air-Flow Microactuator Array for Robust Conveyance Systems'' International Conference on Solid State Sensors and Actuators (Transducers '01), Munich, Germany pp.718-721 2001 June 10-14
E.Lebrasseur, J.-B. Pourciel, T. Bourouina, M. Ozaki,T. Masuzawa, and H. Fujita ``Microsystem for Vertical Profile Measurement of High Aspect-ratio Microstructures'' International Conference on Solid State Sensors and Actuators (Transducers '01), Munich, Germany pp.1058-1061 2001 June 10-14
Hiroyuki Fujita ``MEMS Technology and Application to Optical Communication'' 20th. Electronic Materials Symposium, EMS20, Millennium symposium, Extended Abstracts of The 20th Electronic Materials Symposium, Nara Centennial Hall, Nara, Japan pp17-20 2001 June 20th.-22nd.
T. Bourouina, E. Lebrasseur, G. Reyne, H. Fujita, T. Masuzawa, A. Ludwig, E.Quandt, H. Muro, T. Oki, A. Asaoka ``A Novel Optical Scanner with Integrated Two-Dimensional Magnetostrictive Actuation and Two-Dimensional Piezoresistive Detection'' International Conference on Solid State Sensors and Actuators (Transducers '01), Munich, Germany pp.1328-1331 2001 June 10-14
G. Reyne, L. Houlet, T. Iizuka, H. Fujita ``Matrix array of thick thin-film SU8 electroplated microcoils for micro-actuation'' Joint European Magnetic Symposia (EMMA-MRM), Grenoble, France pp. 200 2001 Aug 28th-Sept. 1st
K. Cozic, M. Frenea, A. Tixier, B. Le Pioufle, H. Fujita, E. Tamiya. ``A bio-microsystem for gene therapy: catching, attaching and preliminary tests of electroporation on cells'' International Symposium on Microchemistry and Microsystems (ISMM'2001),Kawasaki, Japan pp. 112 2001 Sept. 18-19
Patrick Degenaar, Laurent Griscom, Yuji Murakami, Kenji Yokoyama, Hiroyuki Fujita, Eiichi Tamiya ``Microfluidic chips for screening of neuron drugs'' BIOCHIPS 2001 - Technology Development & Application, Polytechnic University, Brooklyn, NY Brooklyn, NY USA 2001 March 12 - 13
Laurent Griscom, Patrick Degenaar, Bruno LePioufle, Eiichi Tamiya, Hiroyuki Fujita ``Soft Lithographic Techniques For Guidance Of Hippocampal Neurons On Micro-Electrode Arrays Topic: Biosensors And Bioanalytical Systems'' International Conference on Solid State Sensors and Actuators (Transducers '01), Munich, Germany pp.338-341 2001 June 10-14
Yoshifumi Takahashi, Tuji takeuchi, Gilbert Reyne, Hiroyuki Fujita ``Micromachined optical scanner for strings diameter measurement system'' IEEE/LEOS International Conference on Optical MEMS2001, Okinawa (Japan) pp.9-10 2001 Sept. 25-28
Tarik Bourouina, Takahisa Masuzawa, Hiroyuki Fujita ``The MEMSNAS Process: Microloading Effect for Micromachining of 3D Structures with Nearly Arbitrary Shape. Application to Micro-Optics on Silicon.'' IEEE/LEOS International Conference on Optical MEMS2001, Okinawa (Japan) pp.81-82 2001 Sept. 25-28
Philippe Helin, Tarik Bourouina, Lionel Houlet, Gilbert Reyne, Hiroyuki Fujita ``Monolithic,Single Cryrstal Silicon, Vertical Mirrors Arrays with Improved Integration Density for Optical Crossconnects.'' IEEE/LEOS International Conference on Optical MEMS2001, Okinawa (Japan) pp.83-84 2001 Sept. 25-28
Hideo Muro, Takahiko Oki, Akira Asaoka, Tarik Bourouina, Eric Lebrasseur, Gilbert Reyne, Hiroyuki Fujita ``A Novel Piezoresistor-Bridge Configuration for The Simulaneous Detection of Bending and Torsion Modes. Application to Two-Dimensional optical Microscaner'' IEEE/LEOS International Conference on Optical MEMS2001, Okinawa (Japan) pp.87-88 2001 Sept. 25-28
J.P.Gouy, M.Kitamura, A.Ben Moussa, H. Fujita, Y.Arakawa ``Deposition of Organic Semiconductor Through Silicon Shadow Masks for Integrated LED on Silicon'' IEEE/LEOS International Conference on Optical MEMS2001, Okinawa (Japan) pp.123-124 2001 Sept. 25-28
S.Camou, T.fujii, J.P.Gouy, H.Fujita ``Design of a 2-D optical lens on a PDMS micro-chip to improve fluorescence spectroscopy Using Integrated Optical Fibers'' IEEE/LEOS International Conference on Optical MEMS2001, Okinawa (Japan) pp.133-134 2001 Sept. 25-28
L. Houlet, H.Maekoba, G. Reyne, T. Bourouina, P. Helin, H. Fujita ``Electromagnetic Actuation for Optical Matrix Micro-Switches'' IEEE/LEOS International Conference on Optical MEMS2001, Okinawa (Japan) pp.15-16 2001 Sept. 25-28
Hiroyuki Fujita ``Micromachined Tools for the Investigation of Nano World -Joint Research between CNRS and IIS/University of Tokyo-'' Mecatronics'01 5th Franco-Japanese Congress & 3rd European-Asian Congress Besancon(France) pp.4-10 2001 Oct. 9-11.
Jean Philippe Gouy, Satoshi Oshima, Yoshio Mita, Agnes Tixier, Hiroyuki Fujita ``Electrical Microconnector using Micromachined Cantilevers for 3D Chip Level Assembly'' Mecatronics'01 5th Franco-Japanese Congress & 3rd European-Asian Congress Besancon(France) pp.383-386 2001 Oct. 9-11.
Gilbert Reyne, Lionel Houlet, Yoshifumi Takahashi, Tarik Bourouina, Hiroyuki Fujita ``Advantages and Examples of Electromagnetic Actuation for MOEMS About Scale Reduction Law and Remote Control'' Mecatronics'01 5th Franco-Japanese Congress & 3rd European-Asian Congress Besancon(France) pp.586-591 2001 Oct. 9-11.
Hiroyuki Fujita ``Micromachined Tools for the Investigator of Nano World '' CIRMM Seminar on Bio-N2M-2001, Paris,France 2001 Oct. 11
T. Masuzawa, J.B. Pourciel ``Profile Measurement of High Aspect-ratio Microstructures'' Robofesta 2001, Yokohama, Japan 2001 Nov. 16-25.
K.Kakushima, G.Hashiguchi, H.Fujita ``Fabrication of Twin Field-Emission Tips by Si Nano Machining for TEM Observation'' The 21st International Display Research Conference in conjunction with The 8th International Display Workshop,Asia Display/IDW'01, Nagoya Congress Center, Japan pp.1177-1180 2001 Oct. 16-19
Hiroyuki Fujita ``The role of micromachine tools for bio/nano technology'' 第四回 日仏バイオセンサー・バイオエレクトロニクス会議、東京大学先端科学技術研究センター p.49 2001.10.23-26
A.Tixier,Katell Cozic, Bruno Le Pioufle, Hiroyuki Fujita, Eiichi Tamiya ``Cathing Cells using an Array of Microholes'' 第四回 日仏バイオセンサー・バイオエレクトロニクス会議、東京大学先端科学技術研究センター p.50 2001.10.23-26
M.Ferena, K.Cozig, A.Tixier, B.Le Pioufle, H.Lhermite, P.Coquet, H.Fujita,E.Tamiya ``Methods for self arrangement of living cells on a two-dimensional array of microchambers for biochips applications'' 第四回 日仏バイオセンサー・バイオエレクトロニクス会議、東京大学先端科学技術研究センター p.52 2001.10.23-26
Jean Philippe Gouy, Hiroshi Toshiyoshi, Hiroyuki Fujita ``LIMMS:Laboratory for Integrated MicroMechatronic Systems.A Joint Research On Micromechatronics between the "Centre National de la Recherche Scientifique(CNRS)" amd the "Institute of Industrial Science(IIS)"'' 第四回 日仏バイオセンサー・バイオエレクトロニクス会議、東京大学先端科学技術研究センター p.125 2001.10.23-26
Hiroyuki Fujita ``Micro Machines for Large Prospects'' World knowledge Forum, Korea paper KT-6-1 2001 Oct. 17-19
Hiroyuki Fujita ``Micromachine Research in Universities in the Last Decade'' 第7回国際マイクロマシンシンポジウム pp.111-115 2001.Oct.31-Nov.1
J.B. Pourciel, E. Lebrasseur, T. Bourouina, ``Outil Microsysteme pour le trace de profils de microstuctures a haut facteur de forme'' French Science And Technology Workshop, Tokyo, Japan pp.139-140 2001.Nov.19-20
Hiroyuki Fujita ``MEMS/MOEMS Application to Optical Communication'' Proceedings of SPIE, Micromachining and Microfabrication Process Technology VII, San Francisco, USA Vol.4557 pp.11 -17 2001 Oct. 22-24
Hiroyuki Fujita ``Research Activities of Optical MEMS in Japan'' 2001 IEEE/LEOS Annual Meeting Conference Proceedings, Hyatt Regency La Jolla, San Diego, CA Vol.1 pp.66-67 2001 Nov. 12-13
Lionel Houlet, Gilbert Reyne, Tetsuhiko Iizuka, Tarik Bourouina, Elisabeth-Dufour Gergam, Hiroyuki Fujita ``Copper micro-coil arrays for the actuation of optical matrix micro switches'' Proceedings of SPIE Device and Process Technologies for MEMS and Microelectronics 2, Adelaide, Australia Vol. 4592 pp.422-427 2001 Dec. 17-19
G. Reyne, L. Houlet, Y. Takahashi, T. Bourouina, H. Fujita ``Electromagnetic Remote Control and Down Scaling Advantages and Examples for MOEMS'' Proceedings of SPIE Device and Process Technologies for MEMS and Microelectronics 2, Adelaide, Australia Vol. 4592 pp.205-215 2001 Dec. 17-19
Jean-Bernard Pourciel, Eric Lebrasseur, Tarik Bourouina,Takahisa Masuzawa, Hiroyuki Fujita ``Microsystem Tool for Microsystems Characterization'' Proceedings of SPIE Device and Process Technologies for MEMS and Microelectronics 2, Adelaide, Australia Vol. 4592 pp.- 2001 Dec. 17-19
A. BenMoussa , J. Tatebayashi, J.P Gouy, H. Fujita and Y. Arakawa ``Micro-machined Tunable (Mi-T) VCSEL around 1.3um'' Proceedings of SPIE Device and Process Technologies for MEMS and Microelectronics 2, Adelaide, Australia Vol. 4592 pp.400 2001 Dec. 17-19
J.P. Gouy, Y Arakawa and H. Fujita ``Integration of active materials with silicon micromachining : application to optical MEMS '' Proceedings of SPIE Device and Process Technologies for MEMS and Microelectronics 2, Adelaide, Australia Vol. 4592 pp. 2001 Dec. 17-19
藤田博之、勝部昭明、佐藤一雄、杉山進、杉山佳延、三橋渉 ``センサとマイクロマシン'' 電気工学ハンドブック第6版、社団法人電気学会 10編 pp.439-476 2001 Fev.
藤田博之、橋口原 ``ナノ加工のためのエッチング技術'' 図解ナノテクノロジーのすべて 第3章ナノテクノロジーのための加工・計測、工業調査会 pp.74-77 2001 Nov.

香川大学工学部橋口原研究室
Hashiguchi Lab, Dept. Eng., Kagawa-U

Last Updated: 2002/04/15

Author(s) Title Journal Volume No. Page(s) Date
K.Oka, S.Aoyagi, Y.Isono, G.Hashiguchi and H. Fujita Fabrication of a Micro Needle for a Trace Blood Test 11th International Conference on Solid-State Sensors and Actuators, Munich, Germany pp.412-415 2001年6月
青柳誠司, 岡一成, 荒井泰彦, 高野政晴, 磯野吉正, 大平文和, 橋口原, 藤田博之 微量血液検査システムのための微小注射針の作製 精密工学会秋季大会 p.580 2001年9

jeoleb@vdec.u-tokyo.ac.jp
Date created: Mon Apr 15 10:39:04 JST 2002